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发明名称
METHOD FOR FORMING FINE PATTERN USING CHEMICAL AMPLIFICATION RESIST
摘要
申请公布号
KR100144936(B1)
申请公布日期
1998.04.24
申请号
KR1019940039002
申请日期
1994.12.29
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
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