| 摘要 |
<p>The present invention relates to a non-contact type inspection system for inspection of test samples being conveyed, using a non-contact type inspection device, to judge the quality of the test samples automatically. The non-contact type inspection system comprises an annular rotary table which is rotated to convey test samples, an inspection device mounting table disposed inside and outside the rotary table, and having a CCD camera and the like as a non-contact type inspection device for inspection of the test samples being mounted on the, inspection device mounting table, a rotary head which is supported above the rotary table and rotatably about the rotation center of the rotary, table to hold the upper portions of the test samples being conveyed by the rotary table, and an interlocking mechanism for rotating the rotary head in synchronism with the rotary table. With this construction, the inspection ability of the non-contact type inspection device can be exhibited to a satisfactory extent, the layout of the inspection device can be designed freely, and the inspection of test samples by the inspection device can be performed with a high accuracy and over a wide range.</p> |
