GAS LASER OSCILLATION DEVICE

摘要

PROBLEM TO BE SOLVED: To make it possible to keep an optical component holding body in parallel to the left and right sides by a method wherein a metallic double tube is provided between one pair of flanges and oil injection holes and oil discharge holes are respectively provided in the one pair of the flanges at least 4 pieces by 4 pieces in opposition to each other so that oil is made to flow between the outer and inner tubes of the double tube. SOLUTION: An optical component holding body 7A is formed into a structure, wherein a double tube consisting of metallic outer and inner tubes 13A and 14A is provided between one pair of flanges 15A for holding an optical component. Oil injection holes 16A and oil discharge holes 17A, which communicate with the tubes 13A and 14A, are respectively provided in the one pair of the flanges 15A and 15A at least 4 pieces by 4 pieces in opposition to each other and oil is circulated between the tubes 13A and 14A so that the temperature on the circumference of the double tube becomes even. Accordingly, the temperature on the circumference of the double tube of the holding body 7A is made even by the even flow of the circulating oil and the parallelism of a partially transmitting reflecting mirror to a totally reflecting mirror can be kept.