COATING FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating film forming apparatus which can form a coating film with a thin and uniform thickness even when undulation is generated on a base sheet. SOLUTION: This coating film forming apparatus is constituted in such a way that a chuck plate 10 for holding an LCD base sheet G and a coating liq. feeding means 20 facing to the surface of this LCD base sheet G are relatively moved and the surface of the LCD base sheet G is coated with a resist liq. fed zonally from the coating liq. feeding means 20. In this case, running rollers 50 provided on both sides of the coating liq. feeding means 20 are movably rotated to the side edges of the LCD base sheet G held by the chuck plate 10. It is possible thereby to move the coating liq. feeding means 20 by following the LCD base sheet G and to keep the interval between the LCD base sheet G and the coating liq. feeding means 20 const.