| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the inspecting time of a reticle to the minimum, and avoid the rise of unit cost and extension of time limit of delivery of the leticle by arranging each shot on the leticle so that chips having the same pattern are aligned in line or column direction between a plurality of shots. SOLUTION: Each shot 22-24 formed of a reticle 21 is laid out so that common chips 26 constituting each shot 22-24, or the chips 26 having the same pattern, sub-chip size, and the number of arranged pieces are vertically aligned. Auxiliary pattern chips 27-32 necessary for manufacture which are formed of monitor patterns or alignment patterns are properly arranged around the common chips 26. Since the common chips 26 are arranged in the same line, the defect inspection by a conventional chip comparative inspection can be performed, and the inspecting time can be shortened.</p> |
