ELECTRON BEAM DRAWING DEVICE,申请号JP19960230370-传众专利搜索

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发明名称	ELECTRON BEAM DRAWING DEVICE
摘要
申请公布号	JPH1074682(A)	申请公布日期	1998.03.17
申请号	JP19960230370	申请日期	1996.08.30
申请人	NEC CORP	发明人	ITO KATSUSHI
分类号	G03F7/20;H01J37/317;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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