FORMING DEVICE AND METHOD FOR POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To form a polishing pad for uniformly forming the whole face of a pad by providing a fixing part which prevents the center of a pad forming tool from substantially moving in the radial direction in relation to the center of the polishing pad. SOLUTION: A polishing pad 16 rotates in the direction shown by an arrow A so that a pad forming tool 52 is moved to an arched recessed part 62 and engaged with a roller 64. A fixing part 56 prevents the tool 52 from rotating about the rotary center C1 along with the polishing pad 16 thereby. The center C2 of the pad forming tool 52 is held without being moved in the radial direction of the rotary center C1 of the polishing pad 16. The tool 52 is brought in contact with the rotary pad 16 so that the tool 52 rotates about the center C2 in relation to an arm 60.