| 摘要 |
In the fabrication of vertical cavity surface emitting lasers, patterned wafer fusion promotes low-loss refractive index guiding combined with a mechanically robust and reproducibly fabricatable structure. A fabricated laterally refractive index guided VCSEL includes a plurality of layers of semiconductor, including a bottom mirror stack disposed above a semiconductor substrate, an active region having upper and lower claddings sandwiching a layer of quantum wells disposed above the bottom mirror stack, and a top mirror stack disposed above the active region. A recessed pattern is etched in one of the plurality of layers to create a mode confining layer, prior to wafer fusion, which forms a buried air gap subsequent to wafer fusion. The buried air gap provides a lateral refractive index profile, which functions as a low-loss means for index guiding the VCSEL optical energy to the single fundamental transverse mode. |
