发明名称 MANUFACTURING METHOD OF CERAMIC SUBSTRATE
摘要 A method for manufacturing a ceramic substrate is provided to secure a right position of a via electrode by preventing a ceramic laminate from being contracted to a surface direction. Ceramic laminates(110,120,130) form an inner electrode(140) and a plurality of via electrodes(150). The ceramic laminate is positioned between an uneven surface of an upper jig and the uneven surface of a lower jig(111) and is pressed and plasticized. The upper surface and the lower surface of the ceramic laminate removing the upper jig and the lower jig are planarized. An external electrode is formed for the plurality of exposed via electrodes. A release agent is coated in the uneven surface of the upper jig and the lower jig.
申请公布号 KR20090089530(A) 申请公布日期 2009.08.24
申请号 KR20080014747 申请日期 2008.02.19
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 PARK, SUNG YEOL
分类号 H01L21/84 主分类号 H01L21/84
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