METHOD AND APPARATUS FOR FABRICATING SEMICONDUCTOR, AND SEMICONDUCTOR ELEMENT FABRICATED BY USING THE SAME,申请号JP19960198949-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR FABRICATING SEMICONDUCTOR, AND SEMICONDUCTOR ELEMENT FABRICATED BY USING THE SAME
摘要
申请公布号	JPH1050662(A)	申请公布日期	1998.02.20
申请号	JP19960198949	申请日期	1996.07.29
申请人	HITACHI LTD	发明人	SASAZAWA HIDEAKI;NAKADA TOSHIHIKO;NINOMIYA TAKANORI
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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