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发明名称
LSI LAYOUT METHOD
摘要
申请公布号
JPH1050850(A)
申请公布日期
1998.02.20
申请号
JP19960220399
申请日期
1996.08.02
申请人
NEC CORP
发明人
IRIKITA SHIGEYOSHI
分类号
H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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