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发明名称
Verfahren zur Herstellung von Metallalkylverbindungen und deren Verwendung
摘要
申请公布号
DE3742525(C2)
申请公布日期
1998.02.19
申请号
DE19873742525
申请日期
1987.12.11
申请人
HEINRICH-HERTZ-INSTITUT FUER NACHRICHTENTECHNIK BERLIN GMBH, 10587 BERLIN, DE
发明人
REIER, FRIEDRICH-WILHELM, DR.RER.NAT., 1000 BERLIN, DE;WOLFRAM, PETER, DIPL.-CHEM. DR., 1000 BERLIN, DE;SCHUMANN, HERBERT, PROF. DR., 1000 BERLIN, DE
分类号
C07F5/00;C07F5/06;C23C16/18;(IPC1-7):C07F5/00;C23C16/30;C30B25/02;H01L21/205
主分类号
C07F5/00
代理机构
代理人
主权项
地址
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