SUBSTRATE TRANSFERRING APPARATUS, SUBSTRATE PROCESSOR USING THE SAME, AND SUBSTRATE HOLDER USABLE FOR THEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus having a simple structure to transfer substrates at low cost, without contaminating them, substrate processor using the same, and substrate holder usable for them. SOLUTION: To transfer a series of untreated substrates LW from a transfer carrier TC to a treating carrier PC, a pusher 14 supports this series LW of substrates through a guide 141 with a guide 142 hanging down. The series LW of substrates pushed up by the pusher 14 in this condition are held by inner chucks 15a, 15b. To transfer the series LW of treated substrates to the transfer carrier TC from the treating carrier PC, the pusher 14 supports them as the guide 142 remains lifted up and this series LW of substrates pushed up by the pusher 14 in this condition are held by outer chucks 16 (16a, 16b).