| 摘要 |
PROBLEM TO BE SOLVED: To take place repeatedly a laser oscillation for a long period of time and to make it possible to obtain a desired laser output, by a method in which a voltage is applied to one pair of electrodes so that the direction of a current, which is made to flow between the one pair of the electrodes, is changed at a prescribed period. SOLUTION: A charge is stored in a capacitor 3 for charge storage use using a high-voltage power supply 1 and a charge is stored in a capacitor C1 for charge storage use using a high-voltage power supply 15. When a trigger is put in a thyristor 5 to turn the thyristor on, the charge stored in the capacitor 3 is discharged. A pulsed voltage is applied to both ends of a capacitor 8. A voltage of a shortened pulse width appears in both ends of a capacitor Cp by a magnetic switch 7. When the voltage, which is applied to both ends of the capacitor Cp, is changed, a preionizer 11 starts discharge and free electrons are produced in a laser chamber. Even discharge is generated between discharge electrodes 10a and 10b, and a laser is oscillated. Thereby, the life of the laser chamber can be prolonged and a desired laser output can be obtained for a long time by a control only of an applying voltage to one pair of the electrodes 10a and 10b. |
