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发明名称
THIN FILM VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH1036970(A)
申请公布日期
1998.02.10
申请号
JP19960212066
申请日期
1996.07.22
申请人
NISSIN ELECTRIC CO LTD
发明人
KUBOTA KIYOSHI
分类号
C23C16/44;C23C16/458;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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