| 摘要 |
<p>PROBLEM TO BE SOLVED: To always keep the distance constant between a condensing lens and a dam bar at the time of a laser beam irradiation even though the flatness of a lead frame surface is worsened due to the deformation of the lead frame or the like and to always cut the dam bar under a constant laser beam condensing condition. SOLUTION: The oscillation of a laser beam is controlled to successively cut the dam bar while transfering a work 1 with a XY table. At this time, the dam bar before cutting is irradiated with the detecting light from a detecting light source, the reflecting light is detected with a photosensor to generate a detecting signal, whereby the signal is processed with a pulse converting unit 23 to generate a correcting signal S13 , and a Z table 15 is controlled to move up and down with a main controller 21 in accordance with the correcting signal S13 .</p> |
