| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately adjust position of an indexer arm. SOLUTION: The upper part of an indexer adjusting carrier 10 is opened. When position-adjusting an arm 21 of an indexer, firstly, a sheet of transparent dummy wafer 31 is housed in the indexer adjusting carrier 10, and the indexer adjusting carrier 10 is assigned at a specified position. Then, the arm 21 is inserted on the lower side of the dummy wafer 31, and the arm 21 is adjusted in position so that a sucking opening 22 agrees with a mark 32 of the dummy wafer 31 in terms of position in horizontal direction, and the gap between the lower surface of the dummy wafer 31 and the upper surface of the arm 21 becomes a specified interval. After the position of the arm 21 is decided, the position of the arm 21 or the position to which the arm 21 is moved from the position by a specified distance in a specified direction is stored. |
