发明名称 |
MULTI-RATE POSITIONER SYSTEM HAVING AN IMPROVED PROFILING FILTER |
摘要 |
<p>A multi-rate positioner system (50) receives unpanelized positioning commands from a database storage subsystem (64), profiles the commands (72) into a half-sine positioning signal, and further processes the signal into a low-frequency positioning signal (LFP) and a high-frequency positioning signal (HFP) for actuating respective slow (56, 58) and fast (54) positioners to target locations on a workpiece (62). The slow and fast positioners move without necessarily stopping in response to a stream of positioning command data while coordinating their individually moving positions to produce temporarily stationary tool positions (140) over target locations defined by the database. The multi-rate positioning system reduces the fast positioner movement range requirement while providing significantly increased tool processing throughput.</p> |
申请公布号 |
EP0815499(A1) |
申请公布日期 |
1998.01.07 |
申请号 |
EP19960908876 |
申请日期 |
1996.03.19 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
CUTLER, DONALD, R.;PAILTHORP, ROBERT, M.;UNRATH, MARK, A. |
分类号 |
G05B19/19;B23K26/08;G05B19/39;G05D3/12;H05K3/00;(IPC1-7):G05B19/19;G05B19/416;G05B19/408;G05B19/414 |
主分类号 |
G05B19/19 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|