| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laser beam which is stable for a long period of time by a method wherein a reflection mirror and an electrode are connected through a dielectric, and an earthed conductor is inserted between the reflection mirror and the dielectric. SOLUTION: An electrode 3 and a partial reflection mirror 7 are connected through a dielectric 9, and an earthed conductor 10 is inserted between the dielectric 9 and the partial reflection mirror 7. Thus, the negative electrification of the partial reflection mirror 7 is prevented, and the dielectric 9 only is electrified negatively. Accordingly, the ionized impurities 11 are attracted to the dielectric 9 only which is electrified negatively, and the impurities 11 do not adhere to the surface of the partial reflection mirror 7. As a result, the ionized impurities 11 do not adhere to the partial reflection mirror 7 which outputs a laser beam, the seizing of the impurities 11 is prevented, and gas laser oscilation, which outputs a stable laser beam for a long period of time, can be obtained. |
