发明名称 BODY CONTACT STRUCTURE OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To keep a PN junction constant in contact area so as to make a semiconductor device operate stably even if a PN junction is small in contact area, by a method wherein a P<+> -type body contact diffusion layer and an N<+> - type source region are provided inside a semiconductor substrate adjacent to its surface, and a contact/wiring metal layer is jointed to their upsides. SOLUTION: P<+> -type body contact diffusion layers 102 disposed in separating from each other by a prescribed distance are provided inside a P-type substrate 101 adjacent to its surface and along a channel region. An N<+> -type source region 103 is formed in one piece with the body contact diffusion layers 102 coming into close contact with all their peripheries. Furthermore, contact/wiring metal layers 104 each joined to the upsides of the two adjacent P<+> -type body contact diffusion layers 102 and the N<+> -type source region 103 between the adjacent body contact diffusion layers 102 are provided. By this setup, even if a P-type region and an N-type region are not accurately coincident with each other to form a contact and deviate from each other in contact forming position on a substrate, a PN junction can be kept constant in contact area.
申请公布号 JPH104192(A) 申请公布日期 1998.01.06
申请号 JP19970046188 申请日期 1997.02.28
申请人 LG SEMICON CO LTD 发明人 O KYON KUON
分类号 H01L29/41;H01L21/28;H01L29/10;H01L29/417;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/41
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