发明名称 VIBRATION ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a vibration actuator which can attain long life service, a very small amount of wear, greater driving force and stable driving without generating abnormal stop due to moving wear particle adhesion, and noise. SOLUTION: This actuator 11 is provided with an elastic body 2 involving driving force extraction parts 2a, 2b, and a relative movement member 3 which is brought into press contact with the elastic body 2 through sliding members 5a to 5d mounted on the driving force extraction parts 2a, 2b to conduct one- dimensional relative movement. On a surface 3a where the relative moving member 3 comes into contact with the sliding materials 5a to 5d, a grinding trace 7, 8, 9 or 10 is present, whose main element is in non-vertical direction to the relative movement direction.
申请公布号 JPH09331687(A) 申请公布日期 1997.12.22
申请号 JP19970075280 申请日期 1997.03.27
申请人 NIKON CORP 发明人 KOBAYASHI MINA;ONE KAZUYASU
分类号 H02N2/00;H01L41/09 主分类号 H02N2/00
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