发明名称 Vapor deposition material
摘要 <p>A vapor deposition material which is a sintered body of zirconia containing a stabilizer, wherein the content of monoclinic phase is from 25 to 70%, the content of tetragonal phase is at most 3% and the rest is cubic phase, and of which the bulk density is from 3.0 to 5.0 g/cm&lt;3&gt;, the porosity is from 15 to 50%, the mode size of pores is from 0.5 to 3 mu m, and the volume of pores of from 0.1 to 5 mu m constitutes at least 90% of the total pore volume.</p>
申请公布号 EP0812931(A1) 申请公布日期 1997.12.17
申请号 EP19970109439 申请日期 1997.06.11
申请人 TOSOH CORPORATION 发明人 KONDO, SATOSHI;KUBOTA, YOSHITAKA
分类号 C04B35/486;C23C14/08;C23C14/24;(IPC1-7):C23C14/08;C23C14/30 主分类号 C04B35/486
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