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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH09321131(A)
申请公布日期
1997.12.12
申请号
JP19960137123
申请日期
1996.05.30
申请人
NEC CORP
发明人
IWAO SHOICHI
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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