MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19960131679-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09321133(A)	申请公布日期	1997.12.12
申请号	JP19960131679	申请日期	1996.05.27
申请人	NEC CORP	发明人	IWADARE CHIKASHI
分类号	H01L21/28;H01L21/3205;H01L21/76;H01L21/8249;H01L23/52;H01L27/06;(IPC1-7):H01L21/76;H01L21/320;H01L21/824	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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