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发明名称
Lichtelektrische Längen- oder Winkelmeßeinrichtung
摘要
申请公布号
DE4323712(C2)
申请公布日期
1997.12.11
申请号
DE19934323712
申请日期
1993.07.15
申请人
DR. JOHANNES HEIDENHAIN GMBH, 83301 TRAUNREUT, DE
发明人
HOLZAPFEL, WOLFGANG, DIPL.-PHYS. DR.RER.NAT., 83119 OBING, DE;FRANZ, ANDREAS, DR., 83308 TROSTBERG, DE
分类号
G01D5/36;G01B11/02;G01B11/26;G01D5/38;H01L27/144;H01L27/15;H01L31/173;(IPC1-7):G01B11/00;G01B21/04;G01D5/26;H01L31/167
主分类号
G01D5/36
代理机构
代理人
主权项
地址
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