,申请号JP19930162455-传众专利搜索

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发明名称
摘要
申请公布号	JP2690675(B2)	申请公布日期	1997.12.10
申请号	JP19930162455	申请日期	1993.06.30
申请人		发明人
分类号	G01B11/14;G01B11/30;G01B21/30;H01L21/66;(IPC1-7):G01B21/30	主分类号	G01B11/14
代理机构		代理人
主权项
地址

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