ADHESIVE SHEET FOR REMOVING RESIST AND METHOD FOR REMOVING RESIST

摘要

PROBLEM TO BE SOLVED: To easily and surely remove an unnecessary resist film image on an article with an adhesive sheet independently of the kind and properties of the resist and to prevent the leaving of particles on the article after the removal. SOLUTION: An adhesive layer contg. 0.01-3wt.% surfactant is formed on a film substrate to obtain the objective adhesive sheet for removing a resist. This adhesive sheet is stuck on an article on which a resist film image exists and the sheet, together with the resist material, is peeled to remove the resist material on the article. When the adhesive sheet is a curable sheet, it is cured before the peeling.