发明名称 Method for removing photoresist with solvent and ultrasonic agitation
摘要 Liquid solvents having superior cleaning power include at least one polar compound having at least one strongly electronegative oxygen, such as ethylene diacetate, and at least one alicyclic carbonate, such as ethylene carbonate, with or without other additives. The solvents exhibit low toxicity; are nonflammable, pH neutral, essentially nonvolatile, and aprotic; and have other chemical and physical properties that reduce the risk of exposing the user unnecessarily to hazardous conditions. Solvents comprising ethylene carbonate, ethylene diacetate, and, optionally, triethanolamine and/or N-methyl-2-pyrrolidone are superior cleaners for a wide range of residues and are environmentally and physiologically safe.
申请公布号 US5690747(A) 申请公布日期 1997.11.25
申请号 US19950465644 申请日期 1995.06.05
申请人 THE BOEING COMPANY 发明人 DOSCHER, PATRISHA A.
分类号 C09D9/00;C11D7/26;C11D7/32;C11D7/50;C23G5/032;G03F7/42;(IPC1-7):B08B3/12;C23G5/02 主分类号 C09D9/00
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