Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung

摘要

A cantilever type probe comprises a cantilever-shaped displacement element having electrodes (5-10) for driving which displace two layers (3,4) of piezoelectric material at the interface and first and second surfaces of the layers, respectively, and each of the electrodes being arranged separately within the same plane, and a tip (1) for information input and output connected to electrodes for drawing out arranged separately from the electrodes for driving at the free end of either one of the first and second surfaces of the element. A scanning tunneling microscopy or an information processing device comprises the cantilever type probe, a driving means for driving the displacement element of the cantilever type probe and a bias or pulse voltage application means for applying a bias or pulse voltage between a sample and the probe. <IMAGE>