发明名称 |
A METHOD OF MAKING A MONOLITHIC MICROWAVE CIRCUIT WITH THICK CONDUCTORS |
摘要 |
A monolithic microwave integrated circuit (MMIC) is produced by a method which forms multilevel conductive members, including thick low-loss metallic members. The low-loss metallic members are particularly useful for forming inductors and interconnecting circuit components. The MMIC is formed on a thick oxide layer of a silicon-on-insulator structure having a high-resistivity silicon substrate to inhibit RF interaction with the substrate. |
申请公布号 |
WO9742654(A2) |
申请公布日期 |
1997.11.13 |
申请号 |
WO1997IB00464 |
申请日期 |
1997.04.30 |
申请人 |
PHILIPS ELECTRONICS N.V.;PHILIPS NORDEN AB |
发明人 |
KIM, MANJIN, J. |
分类号 |
H01L21/822;H01L21/02;H01L21/768;H01L27/04;H01L27/06 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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