| 摘要 |
A miniature planar electromagnetic actuator. Torsion bars (6) of the actuator which support a movable plate (5) are conductive because boron is diffused in the bars (6) at a high concentration and the planar coil (7) of the actuator is electrically connected to an external power source through the torsion bars (6). Thus, no disconnection fault occurs because wiring which might break due to repetition of torsional movement of the bars (6) is eliminated, and consequently the durability and reliability of the actuator are improved. |
