发明名称 Process for manufacturing an integrated transistor with thick oxide
摘要 A process for manufacturing an integrated circuit provides for the formation of a matrix of floating-gate non-volatile memory cells having dual polysilicon levels, with the two polysilicon levels being isolated by a gate dielectric layer (4) and an interpoly dielectric layer (9) therebetween, and for the concurrent formation of one type of thick-oxide transistor (7) in peripheral zones to the matrix. The process of the invention provides for removal, during the step of defining the first-level polysilicon (5) in order to form the floating-gate structures of the memory cells, of the polysilicon (5) from the active area zone of the thick-oxide transistor (7), so that the gate oxide of the transistor (7) results from the superposition of said first (4) and second (9) dielectric layers. <IMAGE>
申请公布号 EP0805479(A1) 申请公布日期 1997.11.05
申请号 EP19960830244 申请日期 1996.04.30
申请人 STMICROELECTRONICS S.R.L. 发明人 ROLANDI, PAOLO
分类号 H01L21/8247;H01L27/105;(IPC1-7):H01L21/00;H01L21/824 主分类号 H01L21/8247
代理机构 代理人
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