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发明名称
MULTI-TEMPERATURE CONTROL SYSTEM AND REACTION PROCESSOR TO WHICH SAME IS APPLIED
摘要
申请公布号
JPH09280756(A)
申请公布日期
1997.10.31
申请号
JP19960180102
申请日期
1996.06.20
申请人
KOMATSU LTD
发明人
KADOTANI KANICHI
分类号
F28D7/10;H01L21/02;H01L21/205;(IPC1-7):F28D7/10
主分类号
F28D7/10
代理机构
代理人
主权项
地址
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