| 摘要 |
PROBLEM TO BE SOLVED: To enable the accurate superposition of substrates by using plural markings formed on the respective transparent substrates to be superposed on each other, determining the moving quantities of the transparent substrates to minimize the total sum of the misalignment of the respective corresponding and moving these substrates. SOLUTION: The glass substrate 1 is mounted at a base plate 3 and the glass substrate 2 is sucked by vacuum chucks 8 and is mounted at a base plate 10. The glass substrate 2 is then pressurized by a pressurizing cylinder 13 and the images of the earmarks at >=3 points formed on the respectively glass substrates 1, 2 are picked up by plural cameras 11. The deviations between the corresponding maskings are measured by an image processor 80. Next, an arithmetic unit 81 calculates the correction the correction rotes in X, Y andθdirections so as to minimize the total sum of the deviations of the respective maskings by using these measuring data. A fine adjustment device 5 moves the glass substrate 1 by the moving quantitiesΔX,ΔY andθresulted with these calculations in accordance with the control signals from a controller 82.
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