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发明名称
Vorrichtung und Verfahren zur Lichtmessung unter Verwendung eines Supraleiters
摘要
申请公布号
DE69031501(D1)
申请公布日期
1997.10.30
申请号
DE1990631501
申请日期
1990.07.04
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
DEN, TOHRU, TOKYO, JP;SHINJO, KATSUHIKO, ATSUGI-SHI, KANAGAWA-KEN, JP;MOTOI, TAIKO, ATSUGI-SHI, KANAGAWA-KEN, JP;KAWASAKI, TAKEHIKO, ATSUGI-SHI, KANAGAWA-KEN, JP;KANEKO, NORIO, ATSUGI-SHI, KANAGAWA-KEN, JP
分类号
G01J1/42;H01L39/10;(IPC1-7):G01J1/42;H01L39/22
主分类号
G01J1/42
代理机构
代理人
主权项
地址
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