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发明名称
Verfahren zur plasmaunterstützten Abscheidung von dünnen Schichten
摘要
申请公布号
DE19544498(C2)
申请公布日期
1997.10.30
申请号
DE19951044498
申请日期
1995.11.29
申请人
ANTEC ANGEWANDTE NEUE TECHNOLOGIEN GMBH, 65779 KELKHEIM, DE
发明人
HARTMANN, ROLF, DIPL.-ING., 65779 KELKHEIM, DE;RONGE, WERNER, DIPL.-ING., 64546 MOERFELDEN-WALLDORF, DE;TSCHENTSCHER, ARMIN, DIPL.-ING., 65439 FLOERSHEIM, DE
分类号
C23C16/02;C23C16/26;C23C16/30;(IPC1-7):C23C16/30;C23C16/52
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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