| 摘要 |
In a dicing step in which a spout face is formed and a flow path length is defined, for example, a region in a cut depth direction is divided into a cutting region B containing spouts, a region A above the region B, and a region C below the region B. Feedrate v2 when the region B is cut is applied for cutting head material with high quality. Feedrate v1 when the region A is cut is set to, for example, three times the feedrate v2 when the region B is cut, and the blade form is shaped at the feedrate v2. Feedrate v3 when the region C is cut is the same as the feedrate v2 when the region B is cut, whereby affecting the upper cut face is prevented and the yield is improved.
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