| 摘要 |
An acceleration sensor includes an acceleration mass and a substrate mounted so that a cavity is defined therebetween and so that the acceleration mass moves relative to the substrate when an acceleration of the sensor changes. The sensor also includes a diamond field emitter for generating an electron beam through the cavity between the acceleration mass and the substrate. Accordingly, the distance between the acceleration mass and the substrate affects the current of the electron beam which is measured to determine the acceleration of the sensor. The sensor may alternately include an annular extraction electrode in a cavity between a substrate and a collector together with a diamond field emitter for generating an electron beam which passes through the annular extraction electrode. The annular extraction electrode is moveable relative to the substrate in response to changes in an acceleration acting on the sensor. Accordingly, the electron beam current changes as the annular extraction electrode moves, and the current can be measured to determine the acceleration acting on the sensor.
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