MANUFACTURE OF FIELD EMISSION ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a field emission electron source which can provide high electric current density. SOLUTION: A conductive projected fine structure 3 is formed on the surface of an electrode 2 formed on the surface of a substrate 1 and an electrode layer 6 to be a gate is formed in the peripheral area through an insulating layer 5. A plurality of projected parts 4 to be a cold cathode are formed in the surface of the projected fine structure 3. Positive voltage is applied to the cathode and to the gate electrode, a large quantity of electrons are emitted out of the tip parts of a plurality of the projected parts 4 due to the field effect.