| 摘要 |
PROBLEM TO BE SOLVED: To accurately correct a visual inspection error due to slippage, by correctly detecting a slipped angle from the referential position of an integrated circuit package. SOLUTION: As retrieval regions 52, two regions are set, which are including two lead picture images 41a and 41b inside one by one from both ends out of plural lead picture images, fallen into line, of a package main body picture image 42. Two templates corresponding to the retrieval regions 52 are moved respectively in the vicinities of two retrieval regions 52, to detect positions where both sides are matched. Then, a slipped angleθis detected from the positional relation between two matched positions and a predetermined referential position 51, to correct a visual inspection error in accordance with the slipped angleθ(concretely, Bsinθconcerning lead tip uneven quantity A, and B-Bcosθconcerning lead to lead pitch quantity.
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