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发明名称
HEITANKAMAKU
摘要
申请公布号
JP2661815(B2)
申请公布日期
1997.10.08
申请号
JP19910163449
申请日期
1991.06.10
申请人
TOKYO OKA KOGYO KK
发明人
HASHIMOTO AKIRA;NISHIMURA TOSHIHIRO;MINATO MITSUAKI
分类号
C01B33/12;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):C01B33/12
主分类号
C01B33/12
代理机构
代理人
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地址
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