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发明名称
HANDOTAISEIZOSOCHI
摘要
申请公布号
JP2661103(B2)
申请公布日期
1997.10.08
申请号
JP19880040038
申请日期
1988.02.23
申请人
MITSUBISHI DENKI KK
发明人
KOMORI HIDEKI
分类号
H01L21/302;H01L21/205;H01L21/263;(IPC1-7):H01L21/205
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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