摘要 |
In a beam current measurement device, including an output transistor (T1) for supplying a cathode current (Ic), a measurement output (OUTM) for supplying a measured current (Im) representing the cathode current (Ic), a first current source (Ibias1) coupled to a first main terminal of the output transistor (T1) for supplying a first current (Ibias1), and a second current source (Ibias2) coupled to a second main terminal of the output transistor (T1) for supplying a second current (Ibias2) substantially equal to the first current (Ibias1), a first cascode transistor (Ta) is coupled between the first main terminal of the output transistor (T1) and the measurement output (OUTM). |