摘要 |
A pulse laser beam of energy distribution having a plurality of peaks is generated (e.g. having a TEM01 mode or greater) and is directed onto an optical system. The system combines beam-condensing optical elements and multi-beam-splitting prism elements so that the peaks of energy distribution in the laser beam mode fall correspondingly on the cut surfaces of each of the multi-beam-splitting prism elements. Each of the condensing and splitting elements may either be of transmission or reflection type, and further they may be of separate or integral type. Fresnel lenses or meniscus lenses may be used as beam-condensing optical elements. As a result, a plurality of pulse laser beam-condensed spots are produced. |