| 发明名称 |
TARGET, MAGNETRON SOURCE WITH SAID TARGET, AND PROCESS FOR PRODUCING SAID TARGET |
| 摘要 |
When a ferromagnetic-material target (1) is used, the magnetron stray field is influenced selectively by provision of a pattern of blind holes (3) in order to counteract the effect of the ferromagnetic material in the form of a magnetic short circuit. |
| 申请公布号 |
WO9735043(A1) |
申请公布日期 |
1997.09.25 |
| 申请号 |
WO1997CH00114 |
申请日期 |
1997.03.19 |
| 申请人 |
BALZERS AKTIENGESELLSCHAFT;QUADERER, HANS;WEICHART, JUERGEN |
发明人 |
QUADERER, HANS;WEICHART, JUERGEN |
| 分类号 |
C23C14/34;C23C14/35;H01J37/34 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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