| 摘要 |
<p>In an ink jet head (1), a first silicon single crystal substrate (2) having a substrate surface (2a), of which a crystal face orientation corresponds to a crystal face (100), is subjected to a wet type crystal anisotropic etching to form ink nozzles (4) and grooves (7A) for formation of orifices, a second silicon single crystal substrate (3) having a substrate surface (3a), of which a crystal face orientation corresponds to a crystal face (110), is subjected to a wet type crystal anisotropic etching to form grooves (5A) for formation of ink cavities and grooves (6A) for formation of an ink reservoir, and these silicon single crystal substrates are joined to each other to define the ink nozzles (4), ink cavities (5) communicating with the respective ink nozzles, a common ink reservoir (6) for supplying ink to the respective ink cavities and orifices (7) which establishes communication between the respective ink cavities and the ink reservoir. Thus crystal face orientations of the respective substrates (2, 3) are set in such manner whereby the respective grooves can be formed with high precision, the respective nozzles vary least in ink delivery characteristics and ink jet heads with high printing qualities can be manufactured.</p> |
