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发明名称
HANDOTAISOCHI
摘要
申请公布号
JP2656614(B2)
申请公布日期
1997.09.24
申请号
JP19890131340
申请日期
1989.05.26
申请人
HITACHI SEISAKUSHO KK
发明人
INOMATA FUJIHIKO;TSUGIBASHI HAJIME;MATSURA AKIRA;SHIMURA ISAO
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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