Process and apparatus for refining silicon (4) by treatment in a graphite vessel with irradiation with an electron beam (2) while removing impurity elements by evaporation. A single graphite vessel (8) is used, or plural graphite vessels are arranged in sequence. During treatment in successive graphite vessels, molten silicon is poured in succession from one vessel to another. Use of graphite vessels improves heat efficiency, prevents contamination and produces refined silicon containing very low contents of impurities. <IMAGE>
