| 摘要 |
A laser processing method is carried out by a laser apparatus comprising: an oscillator; a spatial filter comprising a first convex lens, a member having a pinhole portion, and a second convex lens on an optical axis of the laser beam from an oscillator; two galvano-mirrors; and an f theta lens. The method includes: emitting a laser beam from the oscillator, focusing the laser beam by the first convex lens, removing non-focusing components in a peripheral portion of a focusing spot performed by the first convex lens by passing the laser beam which has passed through the first convex lens through the pinhole portion, a focal distance of the first convex lens being set so that a focusing diameter of the laser beam at the pinhole portion of the member is equal to or smaller than a focusing diameter of the laser beam which has passed through the f theta lens, restoring the laser beam which has passed through the pinhole portion into a parallel laser beam by the second convex lens, scanning the laser beam which has passed through the second convex lens by means of the two galvano-mirrors, and focusing the scanned laser beam by means of the f theta lens on a work to execute processing of the work.
|
