| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer orientation device which is easily manufactured and assembled and low in manufacturing cost. SOLUTION: A wafer orientation device carries out an orienting operation in such a manner that a pair of rotating rollers 25 are made to abut against the lower part of a wafer 1 and rotated in the same direction to orient the wafer 1. In this case, protrudent stripes 26 are provided to the rotary roller 25 at a regular interval in a circumferential direction extending along the generatrix. At this point, the roller 25 is brought into contact with the wafer 1 through the intermediary of the tips of the protrudent stripes 26, so that a contact surface between the roller 25 and the wafer 1 is markedly lessened in area and enhanced in pressure to increase a frictional resistance, and the rotation of the roller 25 is smoothly transmitted to the wafer 1 without slippage. Moreover, the protrudent stripes 26 are provided to the roller 25 extending in its axial direction, so that the wafer 1 is not required to be aligned with the rollers 25 in the axial direction.</p> |
